Elastomer Seal Thermal Mass Flow Meters/Controllers

Model:
SLA5800 Series

Brooks® SLA5800 Series elastomer sealed digital thermal mass flow measurement and control products offer unparalleled flexibility and performance. They offer faster response, better accuracy and improved control over traditional analog devices. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These devices are globally approved for use in a variety of service areas.

• Wide FS flow range for measurement and control of gases from <3 ccm to 2500 lpm (N2 equivalent)
• Accuracy up to 1200 lpm: ±1.0% of rate (20%-100% FS) ±0.2% FS (below 20% FS) 1200-2500 lpm: ±1% FS including linearity. (at calibration conditions).
• Industry leading sensor stability. Long term drift performance of < 0.2% per year. Increased system throughput by reducing maintenance and eliminating periodic recipe adjustment.
• Storage of up to 10 selectable calibration curves. Spares inventories are reduced by limiting the number of individual MFC/M's required, lowering inventory holding costs.
• Elastomer downport process connection option conforms to ANSI/ISA SP-76 standard to offer simplified installation and maintenance in an efficient footprint.